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Syllabus ( NANO 512 )

   Basic information
Course title: Advanced Fabrication Techniques in Nanotechnology
Course code: NANO 512
Lecturer: Assist. Prof. Nihan AYDEMİR
ECTS credits: 7.5
GTU credits: 3 (3+0+0)
Year, Semester: 2021-2022, Fall
Level of course: Second Cycle (Master's)
Type of course: Area Elective
Language of instruction: English
Mode of delivery: Face to face
Pre- and co-requisites: none
Professional practice: No
Purpose of the course: The aim of this course is to teach micro and nano-fabrication methods and technology to students from science and engineering origins. Basic Fundamentals of physics and differential equations are enough to be eligible fort his course. This curse teaches students how micro and nano devices are made and the necessary processing methods.

Topics which will be covered in this course are mainly as follows,
Energy Bands and Carrier Concentration in Thermal Equilibrium, Carrier Transport Phenomena, Crystal Growth and Epitaxy, Film Formation, Lithography and Etching, Impurity Doping, Integrated Devices Basics of CMOS Technology, Thin Film Transistors

The aim of this course is to provide basics micro-nano fabrication background with which MS students can use in their research. Therefore the weight of the exams are decreased and the weight of homeworks is increased. Exams will be open book and one page cheat sheet can be used. Students can exchange ideas among each other and cooperation is encouraged but copying directly from your friends or any other source is forbidden. Each student must bring their own work.
   Learning outcomes Up

Upon successful completion of this course, students will be able to:

  1. Upon completion of this course student will have the fundamental background about advanced fabrication methods.

    Contribution to Program Outcomes

    1. To gain in-depth knowledge and experience about basic concepts and methods in nanoscience and nanotechnology.
    2. To be knowledgeable and practical about the production and characterization techniques of materials and devices in nano scale.
    3. To manage nanotechnology-focused solutions and products commercialization processes.
    4. To take an active role in Product Development and Research-Development processes
    5. Design and conduct independent research projects.

    Method of assessment

    1. Written exam
    2. Homework assignment
    3. Seminar/presentation
  2. Upon completion of this courese, student can easily follow the literature on nanotechnology.

    Contribution to Program Outcomes

    1. To gain in-depth knowledge and experience about basic concepts and methods in nanoscience and nanotechnology.
    2. To be knowledgeable and practical about the production and characterization techniques of materials and devices in nano scale.
    3. Ability to work independently and take responsibility
    4. Acquire scientific knowledge.
    5. Learning Competence
    6. Develop an awareness of continuous learning in relation with modern technology

    Method of assessment

    1. Written exam
    2. Homework assignment
    3. Seminar/presentation
  3. Upon completion of this course, Student will be knowlegable on fabrication methods of nanostructures and their applications. In addition, he/she can develop or plan micro-nano fabrication methods in his/her nanotechnology related research, photonics, optoelectronics, microfluidics, spintronics, biyotechnology etc..

    Contribution to Program Outcomes

    1. To gain in-depth knowledge and experience about basic concepts and methods in nanoscience and nanotechnology.
    2. To be knowledgeable and practical about the production and characterization techniques of materials and devices in nano scale.
    3. To take an active role in Product Development and Research-Development processes
    4. Ability to work independently and take responsibility
    5. Acquire scientific knowledge.
    6. Design and conduct independent research projects.
    7. Learning Competence
    8. Develop an awareness of continuous learning in relation with modern technology
    9. Communication and Social Competence
    10. Field-based Competence

    Method of assessment

    1. Written exam
    2. Homework assignment
    3. Seminar/presentation
   Contents Up
Week 1: Motivation, Vacuum science and plasmas
Week 2: Energy Bands and Time Independent Schrödinger Equation
Week 3: Thin film deposition (PVD, CVD, Epitaxy, ALD)
Week 4: Thin film deposition (PVD, CVD, Epitaxy, ALD)
Week 5: Diffusion, High temperature prosesses
Week 6: Ion implantation
Week 7: Ething, Wet etching
Week 8: Dry etching
Week 9: Optical lithography
Week 10: Nonoptical lithographic techniques, Midterm Exam
Week 11: Nanofabrication with direct manipulation STM, AFM, nanolithography
Week 12: Bottom Up approaches, Nanosphere lithography, Quantum dots
Week 13: Carbon nanotubes, Nanowires
Week 14: Graphene
Week 15*: Carbon nanotubes, Nanowires, Graphene fabrication methods and their applications
Week 16*: Presentations on Nanotechnology Topics
Textbooks and materials: Semiconductor Devices Physics and Technology 2nd Ed. S.M. Sze
Recommended readings: Introduction to Nanoscience, S. M. Lindsay
Fabrication Engineering at the Micro and Nanoscale, Stephen A. Campbell 3rd Edition
  * Between 15th and 16th weeks is there a free week for students to prepare for final exam.
Assessment Up
Method of assessment Week number Weight (%)
Mid-terms: 1 Vize 20
Other in-term studies: Sunum(20), derse katılım(10) 30
Project: 0
Homework: Ev ödevi 20
Quiz: quizler (%10 ekstra puan) 0
Final exam: Final 30
  Total weight:
(%)
   Workload Up
Activity Duration (Hours per week) Total number of weeks Total hours in term
Courses (Face-to-face teaching): 3 16
Own studies outside class: 4 16
Practice, Recitation: 3 16
Homework: 1 16
Term project: 0 0
Term project presentation: 2 1
Quiz: 1 2
Own study for mid-term exam: 0 0
Mid-term: 2 1
Personal studies for final exam: 0 0
Final exam: 2 1
    Total workload:
    Total ECTS credits:
*
  * ECTS credit is calculated by dividing total workload by 25.
(1 ECTS = 25 work hours)
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