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Syllabus ( NANO 616 )

   Basic information
Course title: NEMS and MEMS
Course code: NANO 616
Lecturer: Prof. Dr. Fikret YILDIZ
ECTS credits: 7.5
GTU credits: 3 (3+0+0)
Year, Semester: 1/2, Fall and Spring
Level of course: Second Cycle (Master's)
Type of course: Area Elective
Language of instruction: English
Mode of delivery: Face to face
Pre- and co-requisites: none
Professional practice: No
Purpose of the course: Provide the physical and chemical theoretical background required for the production of electromechanical systems (MEMS and NEMS) in nano and micro structures. Subjects such as general clean room safety, lithography, additive and subtractive processes, micromachining techniques, deep reactive ion etching (DRIE), clean room production, packaging, scaling, microfluidics, small scale pressure sensors, mass sensors, biosensors, radio frequency switches and signal filters and inertial sensors (accelerometer and gyroscope) will be covered.
   Learning outcomes Up

Upon successful completion of this course, students will be able to:

  1. Learning the physical and chemical theoretical background required for the production of electromechanical systems (MEMS and NEMS) in nano and micro structures.

    Contribution to Program Outcomes

    1. To gain in-depth knowledge and experience about basic concepts and methods in nanoscience and nanotechnology.
    2. To be knowledgeable and practical about the production and characterization techniques of materials and devices in nano scale.
    3. Acquire scientific knowledge.
    4. Develop an awareness of continuous learning in relation with modern technology

    Method of assessment

    1. Written exam
    2. Homework assignment
  2. Learning the methodology of choosing in materials and fabrication techniques for NEMS and MEMS

    Contribution to Program Outcomes

    1. Acquire scientific knowledge.
    2. Develop an awareness of continuous learning in relation with modern technology
    3. To understand the basic principles and applications of new tools and / or software required for thesis work.

    Method of assessment

    1. Written exam
    2. Homework assignment
  3. To understand the working principle of Nano and Micro Electromechanical Systems

    Contribution to Program Outcomes

    1. To gain in-depth knowledge and experience about basic concepts and methods in nanoscience and nanotechnology.
    2. To be knowledgeable and practical about the production and characterization techniques of materials and devices in nano scale.
    3. Ability to work independently and take responsibility

    Method of assessment

    1. Written exam
    2. Homework assignment
   Contents Up
Week 1: Introduction to MEMS and NEMS. Simple components, mechanisms and machines.
Week 2: Construction and design
Week 3: MEMS Technology. Processing and machining
Week 4: Thin film deposition processes for MEMS.
Week 5: Multilayer modifications for MEMS.
Week 6: Lubrication films in micro-scale. Types of lubrication.
Week 7: Lubrication films in nano-scale 1
Week 8: Midterm exam, Lubrication films in nano-scale 2
Week 9: Manipulation with micro- and nano-objects I. Light field and optical traps.
Week 10: Manipulation with micro- and nano-objects II. Optical tweezers and
scissors.
Week 11: Micro-machining. Laser modified surfaces.
Week 12: Mapping of micro- and nano-objects.
Week 13: Instruments for 3D micro- and nanotopography.
Week 14: Mapping of micro- and nano-objects II. AFM, SNOM.
Week 15*: Future of MEMS and NEMS. Examples of actual problems in micro- and
nano-scale.
Week 16*: Final exam
Textbooks and materials: S. E. Lyshevski:Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, CRC Press, 2000
Pelesko, J. A. and Bernstein, D. H. Modeling MEMS and NEMS, Chapman and Hall/CRC, 2003
Recommended readings: Batra, R. C., Porfiri, M., Spinello, D., 2007: \Review of modeling electrostatically actuated microelectromechanical systems", Smart Materials and Structures, 16(6), R23-R31
M. Gad-El-Hak: Modeling MEMS and NEMS,CRC Press, 2002
  * Between 15th and 16th weeks is there a free week for students to prepare for final exam.
Assessment Up
Method of assessment Week number Weight (%)
Mid-terms: 8 40
Other in-term studies: 0
Project: 0
Homework: 2-13 20
Quiz: 0
Final exam: 16 40
  Total weight:
(%)
   Workload Up
Activity Duration (Hours per week) Total number of weeks Total hours in term
Courses (Face-to-face teaching): 3 14
Own studies outside class: 3 14
Practice, Recitation: 0 0
Homework: 10 6
Term project: 0 0
Term project presentation: 0 0
Quiz: 0 0
Own study for mid-term exam: 10 2
Mid-term: 2 1
Personal studies for final exam: 15 1
Final exam: 2 1
    Total workload:
    Total ECTS credits:
*
  * ECTS credit is calculated by dividing total workload by 25.
(1 ECTS = 25 work hours)
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