Syllabus ( ME 618 )
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Basic information
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| Course title: |
Design of Microsystems |
| Course code: |
ME 618 |
| Lecturer: |
Assist. Prof. Recep ÖNLER
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| ECTS credits: |
7.5 |
| GTU credits: |
3 (3+0+0) |
| Year, Semester: |
1/2, Fall and Spring |
| Level of course: |
Third Cycle (Doctoral) |
| Type of course: |
Area Elective
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| Language of instruction: |
English
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| Mode of delivery: |
Face to face
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| Pre- and co-requisites: |
None |
| Professional practice: |
No |
| Purpose of the course: |
This class aims to introduce the theory and principles of major sensing/actuation mechanisms in microsystems and teach the students how engineering knowledge can be implemented in the design phase of microsystems |
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Learning outcomes
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Upon successful completion of this course, students will be able to:
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Understand the basics of microfabrication
Contribution to Program Outcomes
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Define and manipulate advanced concepts of Mechanical Engineering in a specialized way
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Formulate and solve advanced engineering problems,
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Apply modern techniques, skills and equipments to advanced engineering practice
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Question and find out innovative approaches.
Method of assessment
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Written exam
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Homework assignment
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Understand the theory and principles of common microsystems
Contribution to Program Outcomes
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Define and manipulate advanced concepts of Mechanical Engineering in a specialized way
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Formulate and solve advanced engineering problems,
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Do modeling, simulation, and design of dynamical systems.
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Apply modern techniques, skills and equipments to advanced engineering practice
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Work effectively in multi-disciplinary research teams
Method of assessment
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Written exam
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Homework assignment
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Design common microsystems using engineering principles
Contribution to Program Outcomes
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Define and manipulate advanced concepts of Mechanical Engineering in a specialized way
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Formulate and solve advanced engineering problems,
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Do modeling, simulation, and design of dynamical systems.
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Apply modern techniques, skills and equipments to advanced engineering practice
Method of assessment
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Written exam
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Homework assignment
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Contents
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| Week 1: |
Introduction to microsystems, history and trends |
| Week 2: |
Microfabrication basics
Homework 1
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| Week 3: |
Wet etching, dry etching |
| Week 4: |
Surface micromachining, Microfabrication process flow
Homework 2 |
| Week 5: |
Mechanics of microsystems: elasticity and flexures |
| Week 6: |
Plate bending, Pressure sensing
Homework 3 |
| Week 7: |
Principles of piezoresistive sensors |
| Week 8: |
Piezoelectric sensing and actuation
Mıdterm Exam
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| Week 9: |
Capacitive sensing |
| Week 10: |
Electrostatic force
Homework 4 |
| Week 11: |
Mechanical dynamics |
| Week 12: |
Damping, Noise
Homework 5 |
| Week 13: |
Thermal sensing and actuation |
| Week 14: |
Polymer microsystems and Microfluidics |
| Week 15*: |
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| Week 16*: |
Final Exam |
| Textbooks and materials: |
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| Recommended readings: |
Microsystem Design, Stephen D. Senturia, Springer |
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* Between 15th and 16th weeks is there a free week for students to prepare for final exam.
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Assessment
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| Method of assessment |
Week number |
Weight (%) |
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| Mid-terms: |
8 |
30 |
| Other in-term studies: |
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0 |
| Project: |
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0 |
| Homework: |
2,4,6,10,12 |
30 |
| Quiz: |
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0 |
| Final exam: |
16 |
40 |
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Total weight: |
(%) |
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Workload
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| Activity |
Duration (Hours per week) |
Total number of weeks |
Total hours in term |
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| Courses (Face-to-face teaching): |
3 |
14 |
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| Own studies outside class: |
4 |
14 |
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| Practice, Recitation: |
0 |
0 |
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| Homework: |
10 |
5 |
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| Term project: |
0 |
0 |
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| Term project presentation: |
0 |
0 |
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| Quiz: |
0 |
0 |
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| Own study for mid-term exam: |
10 |
1 |
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| Mid-term: |
2 |
1 |
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| Personal studies for final exam: |
15 |
1 |
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| Final exam: |
3 |
3 |
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Total workload: |
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Total ECTS credits: |
* |
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* ECTS credit is calculated by dividing total workload by 25.
(1 ECTS = 25 work hours)
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